Study morphology and growth rate of intermetallic compound (IMC) for 3D stacking of fine pitch microbumps

De Preter, IngeIngeDe PreterDerakhshandeh, JaberJaberDerakhshandehRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26506Study morphology and growth rate of intermetallic compound (IMC) for 3D stacking of fine pitch microbumpsMeeting abstract