Heterogeneous integration and precise alignment of InP-based photonic crystal lasers to complementary metal-oxide semiconductor fabricated silicon-on-insulator wire waveguides

Karle, T.J.T.J.KarleHalioua, YacineYacineHaliouaRaineri, F.F.RaineriMonnier, P.P.MonnierBraive, R.R.BraiveLe Gratiet, L.L.Le GratietBeaudoin, G.G.BeaudoinSagnes, I.I.SagnesRoelkens, GuntherGuntherRoelkensVan Laere, F.F.Van LaereVan Thourhout, DriesDriesVan ThourhoutRaj, R.R.Raj2021-10-182021-10-182010-030021-8979https://imec-publications.be/handle/20.500.12860/17349Heterogeneous integration and precise alignment of InP-based photonic crystal lasers to complementary metal-oxide semiconductor fabricated silicon-on-insulator wire waveguidesJournal article