Green, M.L.M.L.GreenChang, Shou-ZenShou-ZenChangDe Gendt, StefanStefanDe GendtSchram, TomTomSchramHattrick-Simpers, J.J.Hattrick-Simpers2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12227Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacksJournal article