Rottenberg, XavierXavierRottenbergEkkels, PhillipPhillipEkkelsBrebels, StevenStevenBrebelsCzarnecki, PiotrPiotrCzarneckiNauwelaers, BartBartNauwelaersSoussan, PhilippePhilippeSoussanNolmans, PhilipPhilipNolmansMarchand, LaurentLaurentMarchandGuijarro, JuanJuanGuijarroDe Wolf, IngridIngridDe WolfTilmans, HarrieHarrieTilmansDe Raedt, WalterWalterDe Raedt2021-10-162021-10-162007-10https://imec-publications.be/handle/20.500.12860/12812RF-MEMS technology, components and circuitsProceedings paper