Takeuchi, ShotaroShotaroTakeuchiNguyen, DuyDuyNguyenLeys, FrederikFrederikLeysLoo, RogerRogerLooConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14532Vapor phase doping: an atomic layer deposition approach to n-type doping in classical chemical vapor deposition epitaxyMeeting abstract