Groven, BenjaminBenjaminGrovenNalin Mehta, AnkitAnkitNalin MehtaMeersschaut, JohanJohanMeersschautVanhaeren, DanielleDanielleVanhaerenBender, HugoHugoBenderVerdonck, PatrickPatrickVerdonckVan Elshocht, SvenSvenVan ElshochtRadu, IulianaIulianaRaduCaymax, MattyMattyCaymaxDelabie, AnneliesAnneliesDelabie2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26670Nucleation behaviour of PEALD WS2 on Al2O3 and SiO2Oral presentation