Lee, Jae UkJae UkLeeVanpaemel, JohannesJohannesVanpaemelPollentier, IvanIvanPollentierAdelmann, ChristophChristophAdelmannZahedmanesh, HoumanHoumanZahedmaneshHuyghebaert, CedricCedricHuyghebaertTimmermans, MarinaMarinaTimmermansDe Volder, MichaelMichaelDe VolderGallagher, EmilyEmilyGallagher2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26885Introducing the EUV CNT pellicleMeeting abstracthttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2577345