Material influences on process performance in chemo-epitaxy directed self-assembly integration

Gronheid, RoelRoelGronheidVan Look, LieveLieveVan LookRincon Delgadillo, PaulinaPaulinaRincon DelgadilloPollentier, IvanIvanPollentierCao, YiYiCaoLin, GuanyangGuanyangLinNealey, PaulPaulNealey2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22438Material influences on process performance in chemo-epitaxy directed self-assembly integrationProceedings paper