Polysilicon encapsulated local oxidation of silicon for deep submicron lateral isolation

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersDe Wolf, IngridIngridDe WolfDeferm, LudoLudoDeferm2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1707Polysilicon encapsulated local oxidation of silicon for deep submicron lateral isolationJournal article