Faifer, V.N.V.N.FaiferSchroder, D.K.D.K.SchroderCurrent, M.I.M.I.CurrentClarysse, TrudoTrudoClarysseTimans, P.J.P.J.TimansZangerle, T.T.ZangerleVandervorst, WilfriedWilfriedVandervorstWong, T.M.H.T.M.H.WongMoussa, AlainAlainMoussaMcCoy, S.S.McCoyGelpey, S.S.GelpeyLerch, W.W.Lerch2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12148Influence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctionsJournal article