Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions

Pamidighantam, SayanuSayanuPamidighantamPuers, BobBobPuersBaert, KrisKrisBaertTilmans, HarrieHarrieTilmans2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6690Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditionsJournal article