Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm Silicon

Su, JieJieSuLiang, HuHuLiangPosthuma, NielsNielsPosthumaWellekens, DirkDirkWellekensDecoutere, StefaanStefaanDecoutereLee, Soo MinSoo MinLeeParanjpe, AjitAjitParanjpe2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29515Stress engineered AlN/AlGaN superlattices as high-voltage current blocking layers on 200 mm SiliconMeeting abstracthttps://www.mrs.org/docs/default-source/meetings-events/mrs-conference-services/59th-EMC/preliminary-programs.pdf?sfvrsn=26