Caro, J.J.CaroSmit, G.D.J.G.D.J.SmitSellier, H.H.SellierLoo, RogerRogerLooCaymax, MattyMattyCaymaxRogge, S.S.RoggeKlapwijk, T.M.T.M.Klapwijk2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10190Towards Tunneling Through a Single Dopant AtomProceedings paper