Foubert, PhilippePhilippeFoubertVaglio Pret, AlessandroAlessandroVaglio PretAltamirano Sanchez, EfrainEfrainAltamirano SanchezGronheid, RoelRoelGronheid2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18921Impact of post-litho LWR smoothing processes on the post-etch patterning resultProceedings paper