Wu, WenWenWuBrongersma, SywertSywertBrongersmaVervoort, IwanIwanVervoortBender, HugoHugoBenderVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9938Electrical and microstructural characterization of narrow Cu interconnectsProceedings paper