Nucleation and growth of copper on Ru-based substrates: II. The effect of the suppressor additive

Nagar, MagiMagiNagarRadisic, AlexAlexRadisicStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21184Nucleation and growth of copper on Ru-based substrates: II. The effect of the suppressor additiveProceedings paper