Implantation and activation of phosphorus in amorphous and crystalline Ge on Si

Lieten, RubenRubenLietenBeeman, Jeff W.Jeff W.BeemanSimoen, EddyEddySimoenHaller, Eugene E.Eugene E.HallerDekoster, JohanJohanDekosterLocquet, Jean-PierreJean-PierreLocquet2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21027Implantation and activation of phosphorus in amorphous and crystalline Ge on SiOral presentation