Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processing

Conard, ThierryThierryConardFranquet, AlexisAlexisFranquetVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220151862-6300https://imec-publications.be/handle/20.500.12860/25097Nano-scale feature analysis: Achieving high effective lateral resolution with micro-scale material characterization techniques: application to back-end processingJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201400111/abstract