De Vlaminck, IwijnIwijnDe VlaminckRoels, JorisJorisRoelsTaillaert, DirkDirkTaillaertVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsLagae, LiesbetLiesbetLagaeBorghs, GustaafGustaafBorghs2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/11988Detection of nanomechanical motion by evanescent light wave couplingJournal article