Podpod, ArnitaArnitaPodpodInoue, FumihiroFumihiroInoueDe Wolf, IngridIngridDe WolfGonzalez, MarioMarioGonzalezRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerBeyne, EricEricBeyne2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27152Investigation of advanced dicing technologies for ultra low-k and 3D integrationProceedings paperhttp://ieeexplore.ieee.org/document/7545585/?arnumber=7545585