Vervaeke, M.M.VervaekeDebaes, C.C.DebaesOttevaere, H.H.OttevaereTuteleers, P.P.TuteleersMeeus, W.W.MeeusBrunfaut, M.M.BrunfautVan Campenhout, JanJanVan CampenhoutThienpont, H.H.Thienpont2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/7033Multi-channel optical intra-chip interconnections based on free-space modules: towards manufacturable solutionsProceedings paper