Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2O

Han, Jeong HwanJeong HwanHanNyns, LauraLauraNynsDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmann2021-10-222021-10-2220140897-4756https://imec-publications.be/handle/20.500.12860/23903Reaction Chemistry during the Atomic Layer Deposition of Sc2O3 and Gd2O3 from Sc(MeCp)3, Gd(iPrCp)3, and H2OJournal articlehttp://pubs.acs.org/doi/abs/10.1021/cm403390j