Stacked-etch induced charge loss in hybrid floating gate cells using high- $j inter-gate dielectric

Zahid, MohammedMohammedZahidBreuil, LaurentLaurentBreuilDegraeve, RobinRobinDegraeveBlomme, PieterPieterBlommeTan, Chi LimChi LimTanLisoni, JuditJuditLisoniVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24875Stacked-etch induced charge loss in hybrid floating gate cells using high- $j inter-gate dielectricProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6861156&contentType=Conference+Publications