A comparison between wet HF etching and vapor HF etching for sacrificial oxide removal

Witvrouw, AnnAnnWitvrouwDu Bois, BertBertDu BoisDe Moor, PietPietDe MoorVerbist, AgnesAgnesVerbistVan Hoof, ChrisChrisVan HoofBender, HugoHugoBenderBaert, KrisKrisBaert2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4945A comparison between wet HF etching and vapor HF etching for sacrificial oxide removalProceedings paper