Paraschiv, VasileVasileParaschivVecchio, EmmaEmmaVecchioMilenin, AlexeyAlexeyMileninKar, Gouri SankarGouri SankarKarDemand, MarcMarcDemandCoenegrachts, BartBartCoenegrachtsVertommen, JohanJohanVertommenBoullart, WernerWernerBoullart2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19539Memory node and oxide-nitride-oxide gate stack patterning for a bi-layer poly-silicon channelProceedings paper