Baklanov, MikhaïlMikhaïlBaklanovZhao, LarryLarryZhaoVan Besien, ElsElsVan BesienPantouvaki, MariannaMariannaPantouvaki2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18526Effect of porogen residue on electrical characteristics of ultra low-k materialsJournal article