AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scale

Schulze, AndreasAndreasSchulzeHantschel, ThomasThomasHantschelEyben, PierrePierreEybenVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersVandooren, AnneAnneVandoorenMody, JayJayModyVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23059AFM-based tomography for probing the electrical properties in confined volumes at the nanometer scaleMeeting abstract