Beggiato, MatteoMatteoBeggiatoLoo, RogerRogerLooWei, S.S.WeiMoussa, AlainAlainMoussaBast, G.G.BastFukaya, K.K.FukayaCerbu, DorinDorinCerbuJanardan, NachiketaNachiketaJanardanChirko, K.K.ChirkoHan, HanHanHanDialameh, MasoudMasoudDialamehSantoro, G.G.SantoroLorusso, GianGianLorussoIsawa, M.M.IsawaWimmer, P.P.WimmerKranert, C.C.KranertReimann, C.C.ReimannKuhn, M.M.KuhnVigliante, A.A.ViglianteMeersschaut, JohanJohanMeersschautBelmonte, AttilioAttilioBelmonteCross, A.A.CrossCockburn, A.A.CockburnBeral, ChristopheChristopheBeralCharley, Anne-LaureAnne-LaureCharleyKar, Gouri SankarGouri SankarKarBogdanowicz, JanuszJanuszBogdanowicz2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300033https://imec-publications.be/handle/20.500.12860/459673D-DRAM Si/SiGe superlattices: inspection strategies and evaluationProceedings paper10.1117/12.3052524978-1-5106-8639-7WOS:001514426300033