A 3-axis capacitive nonlinear MEMS energy harvester simulation: unidirectivity no more?

Vysotskyi, BogdanBogdanVysotskyiRochus, VeroniqueVeroniqueRochus2023-11-232023-10-152023-11-2320232833-8553WOS:001058887300025https://imec-publications.be/handle/20.500.12860/42754A 3-axis capacitive nonlinear MEMS energy harvester simulation: unidirectivity no more?Proceedings paper10.1109/EuroSimE56861.2023.10100770979-8-3503-4597-1WOS:001058887300025