Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport

Groven, BenjaminBenjaminGrovenNalin Mehta, AnkitAnkitNalin MehtaSmets, QuentinQuentinSmetsSchram, TomTomSchramBender, HugoHugoBenderVandervorst, WilfriedWilfriedVandervorstRadu, IulianaIulianaRaduCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsDelabie, AnneliesAnneliesDelabie2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28425Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transportMeeting abstracthttps://www.avs.org/Symposium