Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formation

Sivoththaman, SivanarayanamoorthySivanarayanamoorthySivoththamanLaureys, WimWimLaureysNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2151Rapid thermal annealing of spin-coated phosphoric acid films for shallow junction formationJournal article