Development and characterization of a fast neutral beam source for damage-free etching

Marinov, DaniilDaniilMarinovEl Otell, ZiadZiadEl OtellBowden, MarkMarkBowdenBraithwaite, NicholasNicholasBraithwaite2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24211Development and characterization of a fast neutral beam source for damage-free etchingMeeting abstract