Mechanical integrity of nano-interconnects; the impact of metallization density

Zahedmanesh, HoumanHoumanZahedmaneshVanstreels, KrisKrisVanstreels2021-10-282021-10-2820192590-0072https://imec-publications.be/handle/20.500.12860/34509Mechanical integrity of nano-interconnects; the impact of metallization densityJournal articlehttps://doi.org/10.1016/j.mne.2018.12.001