Integration processes for nPERT Si solar cells using single side emitter epitaxy and front side laser doping

Kuzma Filipek, IzabelaIzabelaKuzma FilipekRecaman Payo, MariaMariaRecaman PayoLi, YuandongYuandongLiHajjiah, AliAliHajjiahDuerinckx, FilipFilipDuerinckxCornagliotti, EmanueleEmanueleCornagliottiUruena De Castro, AngelAngelUruena De CastroSharma, AashishAashishSharmaBorgers, TomTomBorgersRussell, RichardRichardRussellTous, LoicLoicTousJohn, JoachimJoachimJohnHaslinger, MichaelMichaelHaslingerAleman, MonicaMonicaAlemanSzlufcik, JozefJozefSzlufcik2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25509Integration processes for nPERT Si solar cells using single side emitter epitaxy and front side laser dopingProceedings paperhttp://www.sciencedirect.com/science/article/pii/S1876610215008437