Integration of an organic ultra low-k (k=2.2) material

Pantouvaki, MariannaMariannaPantouvakiZhao, LarryLarryZhaoHuffman, CraigCraigHuffmanHeylen, NancyNancyHeylenFerchichi, AbdelkarimAbdelkarimFerchichiOno, Y.Y.OnoNakajima, M.M.NakajimaNakatani, K.K.NakataniStruyf, HerbertHerbertStruyfBeyer, GeraldGeraldBeyerBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15972Integration of an organic ultra low-k (k=2.2) materialOral presentation