Deweerd, WimWimDeweerdKaushik, VidyaVidyaKaushikChen, J.J.ChenShimamoto, Y.Y.ShimamotoSchram, TomTomSchramRagnarsson, Lars-AkeLars-AkeRagnarssonDelabie, AnneliesAnneliesDelabiePantisano, LuigiLuigiPantisanoEyckens, BrendaBrendaEyckensMaes, J.W.J.W.MaesDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/10384Potential remedies for the VT/Vfb-shift problem of Hf/polysilicon-based gate stacks: a solution-based surveyJournal article