Extraction of the defect distributions in DRAM capacitor using I–V and C

Sereni, GabrieleGabrieleSereniLarcher, LucaLucaLarcherKaczer, BenBenKaczerPopovici, Mihaela IoanaMihaela IoanaPopovici2021-10-232021-10-2320160741-3106https://imec-publications.be/handle/20.500.12860/27291Extraction of the defect distributions in DRAM capacitor using I–V and C–V sensitivity mapsJournal articlehttps://ieeexplore.ieee.org/document/7544449