In-line litho cluster monitoring and control using integrated scatterometry

Pollentier, IvanIvanPollentierCheng, ShauneeShauneeChengBaudemprez, BartBartBaudemprezLaidler, DavidDavidLaidlervan Dommelen, Y.Y.van DommelenCarpaij, R.R.CarpaijYu, J.J.YuUchida, J.J.UchidaViswanathan, A.A.ViswanathanChin, D.T.D.T.ChinBarry, K.K.BarryJakatdar, N.N.Jakatdar2021-10-152021-10-152004-02https://imec-publications.be/handle/20.500.12860/9450In-line litho cluster monitoring and control using integrated scatterometryProceedings paper