Electrochemical deposition of manganese and copper-manganese alloy on silicon

Radisic, AlexAlexRadisicHernandez, Jose LuisJose LuisHernandezTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerVereecken, PhilippePhilippeVereecken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12748Electrochemical deposition of manganese and copper-manganese alloy on siliconProceedings paperhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=ECSTF8000003000021000069000001&idtype=cvips