Reybrouck, MarioMarioReybrouckVangoidsenhoven, DizianaDizianaVangoidsenhovenMaenhoudt, MireilleMireilleMaenhoudtVan Aelst, JokeJokeVan AelstBoullart, WernerWernerBoullart2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6755Back-end, low-k dielectric compatible resist rework procedureOral presentation