Analysis of uniaxial and biaxial strain impact on the linearity of fully depleted SOI nMOSFETs

Pavanello, Marcelo AntonioMarcelo AntonioPavanelloMartino, Joao AntonioJoao AntonioMartinoSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12681Analysis of uniaxial and biaxial strain impact on the linearity of fully depleted SOI nMOSFETsJournal article