Pham, NgaNgaPhamLimaye, PareshPareshLimayeCzarnecki, PiotrPiotrCzarneckiVarela Pedreira, OlallaOlallaVarela PedreiraCherman, VladimirVladimirChermanSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanTilmans, HarrieHarrieTilmans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17804Metal-bonded, hermetic 0-level package for MEMSProceedings paper