A deep-level transient spectroscopy study of silicon Schottky barriers containing a Si-O superlattice

Simoen, EddyEddySimoenJayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-242021-10-2420170370-1972https://imec-publications.be/handle/20.500.12860/29440A deep-level transient spectroscopy study of silicon Schottky barriers containing a Si-O superlatticeJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssb.201600593/full