Stress in Single-and Multiribbon Complementary FETs (CFETs): Evolution in Process Flow and Impact on Drive Current

Dutta, AchintyaAchintyaDuttaEneman, GeertGeertEnemanThomas, Nicole K.Nicole K.ThomasMatagne, PhilippePhilippeMatagneRadosavljevic, MarkoMarkoRadosavljevic2025-07-272025-07-272025-JUL 10018-9383WOS:001531908400001https://imec-publications.be/handle/20.500.12860/45938Stress in Single-and Multiribbon Complementary FETs (CFETs): Evolution in Process Flow and Impact on Drive CurrentJournal article10.1109/TED.2025.3584743WOS:001531908400001DEPENDENCE