Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer deposition

Armini, SilviaSilviaArminiLoyo Prado, JanaJanaLoyo PradoSwerts, JohanJohanSwertsSun, YitingYitingSunKrishtab, MikhailMikhailKrishtabMeersschaut, JohanJohanMeersschautBlauw, MichielMichielBlauwBaklanov, MikhaïlMikhaïlBaklanovVerdonck, PatrickPatrickVerdonck2021-10-202021-10-2020122162-8726https://imec-publications.be/handle/20.500.12860/20308Pore sealing of porous ultralow-k dielectrics by self-assembled monolayers combined with atomic layer depositionJournal article