Functional and reliability testing of MEMS: instrumentation and methodology

De Wolf, IngridIngridDe Wolf2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12003Functional and reliability testing of MEMS: instrumentation and methodologyOral presentationhttp://livestudio.talkpoint.com/livestudio/guest_default.asp?PresentationGUID=AD5C2E25-2F67-4E6D-BC95-F3FE698E7E04&UserEmail=joh