Salenbien, RobbeRobbeSalenbienSermeus, JanJanSermeusPobedinskas, PauliusPauliusPobedinskasGlorieux, ChristChristGlorieuxHaenen, KenKenHaenen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19720Thin nanocrystalline CVD diamond films for micro-channel cooling: Thermal and elastic propertiesProceedings paper