Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

Polspoel, WouterWouterPolspoelVandervorst, WilfriedWilfriedVandervorstAguilera, LidiaLidiaAguileraPorti, MarcMarcPortiNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-172021-10-1720080026-2714https://imec-publications.be/handle/20.500.12860/14330Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitorsJournal article