De Moor, PietPietDe MoorTilmans, HarrieHarrieTilmansVan De Peer, MyriamMyriamVan De PeerLabie, RietRietLabieBeerten, StevenStevenBeertenBeyne, EricEricBeyneVan Hoof, ChrisChrisVan Hoof2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4269Hermetically sealed on-chip packaging of MEMS devicesProceedings paper