Gao, HangHangGaoHuang, Chih HsienChih HsienHuangWesterveld, WouterWouterWesterveldHaouari, RachidRachidHaouariTroia, BenedettoBenedettoTroiaVerhaegen, FabianFabianVerhaegenJansen, RoelofRoelofJansenFigeys, BrunoBrunoFigeysRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochus2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30739Simulation and characterization of a high-sensitive micro-opto-mechanical microphoneProceedings paperhttps://ieeexplore.ieee.org/document/8369932/